Simple fabrication of nanostructure by continuous rigiflex imprinting

Microelectronic Engineering

Volumn 84, Issue 4, 2007, Pages 567-572

  Seo, Soon min ^a   Kim, Tae il ^a   Lee, Hong H ^a  

^a Seoul National University   (South Korea)

Author keywords

Continuous imprinting; Imprint lithography; Nanostructures; Patterning

Indexed keywords

MICROELECTRONICS; MICROFABRICATION; NANOIMPRINT LITHOGRAPHY; RUBBER MOLDS;

CONTINUOUS RIGIFLEX IMPRINTING (CRIM); PATTERNING;

NANOSTRUCTURES;

EID: 33847620278     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.11.008     Document Type: Article

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