The patterning of sub-500 nm inorganic oxide structures

Advanced Materials

Volumn 20, Issue 14, 2008, Pages 2667-2673

  Hampton, Meredith J ^a   Williams, Stuart S ^a   Zhou, Zhilian ^c   Nunes, Janine ^a   Ko, Doo Hyun ^a   Templeton, Joseph L ^a   Samulski, Edward T ^a   DeSimone, Joseph M ^a,b  

^a The University of North Carolina at Chapel Hill   (United States)

^b North Carolina State University   (United States)

^c Liquidia Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCINATION; COLLOIDS; CROSSLINKING; GAS PERMEABILITY; GELATION; OPTICAL INSTRUMENTS; OPTICAL SENSORS; SENSOR NETWORKS; SURFACE CHEMISTRY; SURFACE TENSION; WETTING;

BIOLOGICAL SENSORS; ELECTRONIC DEVICES; INORGANIC OXIDES; LOW SURFACE ENERGIES; MICROELECTRONIC APPLICATIONS; MULTILAYER DEPOSITIONS; PATTERN REPLICATIONS; PATTERNING; PATTERNING METHODS; PERFLUOROPOLYETHER; PHOTOVOLTAICS; SIZE CONTROLS; SOL - GELS; SURFACE FUNCTIONALIZATION; VOLUME LOSSES;

BIOLOGICAL MATERIALS; POLYMERS;

EMBOSSING; INORGANIC OXIDES; PATTERNING; PERFLUOROPOLYETHERS; SOFT LITHOGRAPHY;

EID: 54949124209     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200702495     Document Type: Article

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