Fabrication of magnetic nanodots array using UV nanoimprint lithography and electrodeposition for high density patterned media

Journal of Photopolymer Science and Technology

Volumn 21, Issue 4, 2008, Pages 591-596

  Shinohara, Hidetoshi ^a   Fukuhara, Makoto ^a   Hirasawa, Tamano ^b   Mizuno, Jun ^a   Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

^b TOYO GOSEI CO LTD   (Japan)

Author keywords

Chemical mechanical polishing; Electrodeposition; Magnetic nanodots array; UV nanoimprint lithography

Indexed keywords

EID: 50849104595     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.21.591     Document Type: Article

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