New polymer materials for nanoimprinting

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 4, 2000, Pages 1861-1865

  Schulz, H ^a   Scheer, H C ^a   Hoffmann, T ^a   Torres, C M Sotomayor ^a   Pfeiffer, K ^b   Bleidiessel, G ^b   Grutzner G ^b   Cardinaud, Ch ^c   Gaboriau, F ^c   Peignon, M C ^c   Ahopelto, J ^d   Heidari, B ^e  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b MICRO RESIST TECHNOLOGY GMBH   (Germany)

^c UNIVERSITÉ DE NANTES   (France)

^d VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^e LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 23044523167     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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