Room-Temperature Nanoimprint Lithography of Non-thermoplastic Organic Films

Advanced Materials

Volumn 16, Issue 6, 2004, Pages 525-529

  Pisignano, Dario ^a,b   Persano, Luana ^a   Raganato, Maria Filomena ^a   Visconti, Paolo ^a   Cingolani, Roberta ^a   Barbarella, Giovanna ^c   Favaretto, Laura ^c   Gigli, Giuseppe ^a  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

^b UNIVERSITY OF SALENTO   (Italy)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMATIONS; DEFORMATION; MOLECULAR STRUCTURE; MOLECULAR WEIGHT; OLIGOMERS; PHOTOLITHOGRAPHY; QUANTUM THEORY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ORGANIC COMPOUNDS; STRESS ANALYSIS; SUBSTRATES; THERMAL EFFECTS;

INTERMOLECULAR ENTANGLEMENT; MOLAR MASS; NANOIMPRINT LITHOGRAPHY (NIL); ROOM TEMPERATURE (RT);

SEMICONDUCTING FILMS;

EID: 2142644575     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200305832     Document Type: Article

References (26)

1. a) S. Y. Chou, P. R. Krauss, P. J. Renstrom, Appl. Phys. Lett. 1995, 67, 3114.
2. b) S. Y. Chou, P. R. Krauss, P. J. Renstrom, Science 1996, 272, 85.
3. B. Heidari, I. Maximov, L. Montelius, J. Vac. Sci. Technol. B 2000, 18, 3557.
4. S. Y. Chou, P. R. Krauss, W. Zhang, L. Quo, L. Zhuang, J. Vac. Sci. Technol. B 1997, 15, 2897.
5. L. Guo, P. R. Krauss, S. Y. Chou, Appl. Phys. Lett. 1997, 71, 1881.
6. Z. Yu, S. J. Schablitsky, S. Y. Chou, Appl. Phys. Lett. 1999, 74, 2381.
7. M. Li, L. Chen, S. Y. Chou, Appl. Phys. Lett. 2001, 78, 3322.
8. D. Pisignano, M. Anni, G. Gigli, R. Cingolani, M. Zavelani-Rossi, G. Lanzani, G. Barbarella, L. Favaretto, Appl. Phys. Lett. 2002, 81, 3534.
9. D.-Y. Khang, H. Yoon, H. H. Lee, Adv. Mater. 2001, 13, 749.
10. G. Barbarella, L. Favaretto, G. Sotgiu, L. Antolini, G. Gigli, R. Cingolani, A. Bongini, Chem. Mater. 2001, 13, 4112.
11. G. Barbarella, L. Favaretto, G. Sotgiu, M. Zambianchi, V. Fattori, M. Cocchi, F, Cacialli, G. Gigli, R. Cingolani, Adv. Mater. 1999, 11, 1375.
12. G. Barbarella, L. Favaretto, G. Sotgiu, M. Zambianchi, A. Bongini, C. Arbizzani, M. Mastragostino, M. Anni, G. Gigli, R. Cingolani, J. Am Chem. Soc. 2000, 122, 11 971.
13. K. Y. Suh, Y. S. Kim, H. H. Lee, Adv. Mater. 2001, 13, 1386.
14. S. Zankovych, T. Hoffmann, J. Seekamp, J.-U. Bruch, C. M. Sotomayor Torres, Nanotechnology 2001, 12, 91.
15. Physical Properties of Polymers Handbook (Ed: J. E. Mark), American Institute of Physics Press, Woodbury, NY 1996.
16. G. Strobl, The Physics of Polymers, Springer, Berlin 1997.
17. J. Wang, X. Sun, L. Chen, S. Y. Chou, Appl. Phys. Lett. 1999, 75, 2767.
18. a) M. Yan, L. J. Rothberg, F. Papadimitrakopoulos, M. E. Galvin, T. M. Miller, Phys. Rev. Lett. 1994, 73, 744.
19. b) F. Papadimitrakopoulos, K. Konstadinidis, T. M. Miller, R. Opila, E. A. Chandross, M. E. Galvin, Chem. Mater. 1994, 6, 1563.
20. M. Behl, J. Seekamp, S. Zankovych, C. M. Sotomayor Torres, R. Zenlel, J. Ahopelto, Adv. Mater. 2002, 14, 588.
21. W. S. Beh, I. T. Kim, D. Qin, Y. Xia, G. M. Whitesides, Adv. Mater. 1999, 11, 1038.
22. a) V. G. Kozlov, V. Bulovic, P. E. Burrows, S. R. Forrest, Nature 1997, 389, 362.
23. b) A. Köhler, J. S. Wilson, R. H. Friend, Adv. Mater. 2002, 14, 701.
24. B. J. Matterson, J. M. Lupton, A. F. Safonov, M. G. Salt, W. L. Barnes, I. D. W. Samuel, Adv. Mater. 2001, 13, 123.
25. G. A. Turnbull, P. Andrews, M. J. Jory, W. L. Barnes, I. D. W. Samuel, Phys. Rev. B: Condens. Matter 2001, 64, 125 122.
26. For a given wavelength, the waveguided mode couples to free radiation only for a very small angular range around θ, in agreement with Equation 1. For this reason the Bragg peaks are not visible in the angle-integrated PL spectrum shown in Figure 4.