Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2993-2997

  Ramachandran, S ^a   Tao, L ^a   Lee, T H ^a   Sant, S ^a   Overzet, L J ^a   Goeckner, M J ^a   Kim, M J ^a   Lee, G S ^a   Hu, W ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINT TEMPLATES; PATTERNING; TEMPLATE-POLYMER SEPARATION;

ATOMIC FORCE MICROSCOPY; DEPOSITION; INTERFACIAL ENERGY; NANOTECHNOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THICK FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 33845259368     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2363409     Document Type: Article

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