Sub-10 nm imprint lithography and applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2897-2904

  Chou, Stephen Y ^a,b   Krauss, Peter R ^a   Zhang, Wei ^a   Guo, Lingjie ^a   Zhuang, Lei ^a  

^a University of Minnesota   (United States)

^b PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012752163     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589752     Document Type: Article

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