Soft lithographic methods for nano-fabrication

Journal of Materials Chemistry

Volumn 7, Issue 7, 1997, Pages 1069-1074

  Zhao, Xiao Mei ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000767293     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/a700145b     Document Type: Article

References (3)

1. F. Cerrina and C. Marrian, MRS Bull., Dec. 1996, 56.
2. L. Geppert, IEEE Spectrum, Apr. 1996, 33.
3. M. D. Levenson, Solid State Technology, Sep. 1995, 81.