Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Applied Physics Letters

Volumn 89, Issue 21, 2006, Pages

  Ahn, Suho ^a   Cha, Joowon ^a   Myung, Ho ^a   Kim, Seok Min ^a   Kang, Shinill ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL DEVICES; DISPLAY DEVICES; ULTRAVIOLET DEVICES;

DIGITAL DISPLAYS; MICROPATTERNS; NANOIMPRINTING; ROLL STAMPERS;

NANOTECHNOLOGY;

EID: 33845432703     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2392960     Document Type: Article

References (12)

1. M. C. McAlpine, R. S. Friedman, and C. M. Lieber, Nano Lett. 3, 443 (2003).
2. G. Jung, Z. Li, W. Wu, S. Ganapathiappan, X. Li, D. L. Olynick, S. Y. Wang, W. M. Tong, and R. S. Williams, Langmuir 21, 6127 (2005).
3. X. Liang, W. Zhang, M. Li, Q. Xia, W. Wu, H. Ge, X. Huang, and S. Y. Chou, Nano Lett. 5, 527 (2005).
4. S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).
5. S. Kim and S. Kang, J. Phys. D 36, 2451 (2003).
6. M. Pudas, J. Hagberg, and S. Leppavuori, J. Eur. Ceram. Soc. 24, 2943 (2004).
7. Y. Mikami, Y. Nagae, Y. Mori, K. Kuwabara, T. Saito, H. Hayama, H. Asada, Y. Akimoto, M. Kobayashi, S. Okazaki, K. Asaka, H. Matsui, K. Nakamura, and E. Kaneko, IEEE Trans. Electron Devices 41, 306 (1994).
8. M. Pudas, J. Hagberg, and S. Leppävuori, IEEE Trans. Electron. Packag. Manuf. 25, 335 (2002).
9. H. Tan, A. Gilbertson, and S. Y. Chou, J. Vac. Sci. Technol. B 16, 3926 (1998).
10. H. Schift, M. Halbeisen, U. Schutz, B. Delahoche, K. Vogelsang, and J. Gobrecht, Microelectron. Eng. 83, 855 (2006).
11. G. Gigli, R. Rinaldi, C. Turco, P. Visconti, and R. Cingolani, Appl. Phys. Lett. 73, 3926 (1998).
12. M. Farhoud, M. Hwang, Henry I. Smith, M. L. Hattenburg, J. M. Bae, K. Youcef-Toumi, and C. A. Ross, IEEE Trans. Magn. 34, 1087 (1998).