Roll-to-roll manufacturing of electronics on flexible substrates using self-aligned imprint lithography (SAIL)

Journal of the Society for Information Display

Volumn 17, Issue 11, 2009, Pages 963-970

  Kim, Han Jun ^a   Marcia, A W ^a   Garcia, Bob ^a   Kwon, Ohseung ^a,d   Jeffrey, Frank ^b   Braymen, Steve ^b   Hauschildt, Jason ^b   Junge, Kelly ^b   Larson, Don ^b   Stieler, Dan ^b   Chaiken, Alison ^c   Cobene, Bob ^c   Elder, Richard ^c   Jackson, Warren ^c   Jam, Mehrban ^c,e   Jeans, Albert ^c   Luo, Hao ^c   Mei, Ping ^c   Perlov, Craig ^c   Taussig, Carl ^c  

^a Phicot Inc   (United States)

^b PowerFilm Inc   (United States)

^c HEWLETT PACKARD COMPANY   (United States)

^d R and D Engineer of Phicot Inc

^e HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

Flexible displays; Flexible electronics; Imprint lithography; Roll to roll; SAIL

Indexed keywords

ACTIVE-MATRIX BACKPLANES; FLEXIBLE DISPLAYS; FLEXIBLE ELECTRONICS; FLEXIBLE SUBSTRATE; GEOMETRY INFORMATION; IMPRINT LITHOGRAPHY; LARGE AREA ARRAYS; MASK STRUCTURES; POLYMER SUBSTRATE; PRE-ALIGNED; PROCESS DEVELOPMENT; ROLL TO ROLL; ROLL TO ROLL MANUFACTURING; SELF-ALIGNED; SUBMICRON-SIZED; TOOLSETS;

ALIGNMENT; NANOIMPRINT LITHOGRAPHY; THIN FILM TRANSISTORS;

SUBSTRATES;

EID: 72149083079     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/JSID17.11.963     Document Type: Article

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