Formation of SiO2 air-gap patterns through scCO2 infusion of NIL patterned PHEMA

Chemistry of Materials

Volumn 22, Issue 4, 2010, Pages 1445-1451

  Ell, John R ^a   Crosby, Todd A ^a   Peterson, Joseph J ^a   Carter, Kenneth R ^a   Watkins, James J ^a  

^a UNIVERSITY OF MASSACHUSETTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SURFACE AREA; AIR-GAPS; POLY(2-HYDROXYETHYL METHACRYLATE); SUPERCRITICAL CARBON DIOXIDES; TETRACHLOROSILANE; TETRAETHYL ORTHOSILICATES;

CARBON DIOXIDE; NANOIMPRINT LITHOGRAPHY; SILICON COMPOUNDS;

SUPERCRITICAL FLUID EXTRACTION;

EID: 77049098920     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm902337t     Document Type: Article

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