Vinyl ethers in ultraviolet curable formulations for step and flash imprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 131-135

  Kim, E K ^a   Stacey, N A ^a   Smith, B J ^a   Dickey, M D ^a   Johnson, S C ^a   Trinque, B C ^a   Willson, C G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLICS; CURING; ETCHING; LITHOGRAPHY; POLYMERIZATION; POSITIVE IONS; SILICON; SYNTHESIS (CHEMICAL); VINYL RESINS; VISCOSITY;

ETCH BARRIERS; FLASH IMPRINT LITHOGRAPHY;

ETHERS;

EID: 1642302875     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1635849     Document Type: Conference Paper

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