Layer thickness-induced lens distortions during thermal nanoimprint

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3016-3020

  Scheer, H C ^a   Bogdanski, N ^a   Mollenbeck S ^a   Wissen, M ^a   Nishilata, M ^b   Hirai, Y ^b  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; POLYSTYRENES; THERMAL EFFECTS; THICK FILMS;

LENS DISTORTIONS; REPLICATION QUALITY; THERMAL NANOIMPRINTS;

OPTICAL INSTRUMENT LENSES;

EID: 33845241071     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2388966     Document Type: Article

References (13)

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