Direct soft UV-NIL with resist incorporating carbon nanotubes

Microelectronic Engineering

Volumn 85, Issue 1, 2008, Pages 195-201

  Choi, Jun hyuk ^a   Jung, Sung un ^a   Choi, Dae geun ^a   Jeong, Jun ho ^a   Lee, Eung sug ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Conductive resist; Nanoimprint; Nanotube dispersed resin; Soft UV NIL

Indexed keywords

ELECTRIC CONDUCTIVITY; NANOIMPRINT LITHOGRAPHY; PATTERN RECOGNITION; ULTRASONIC WAVES;

CONDUCTIVE RESIST; NANOIMPRINTS; NANOTUBE-DISPERSED RESINS; PATTERN TRANSFER RESOLUTION; SOFT UV-NIL; ULTRASONIC VIBRATION;

CARBON NANOTUBES;

EID: 36148956151     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.05.007     Document Type: Article

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