Polymer issues in nanoimprinting technique

Solid-State Electronics

Volumn 43, Issue 6, 1999, Pages 1079-1083

  Gottschalch, Frank ^a   Hoffmann, Thomas ^a   Sotomayor Torres, Clivia M ^a   Schulz, Hubert ^a   Scheer, Hella Christin ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS TRANSITION; MOLECULAR WEIGHT; NANOTECHNOLOGY;

NANOIMPRINTING TECHNIQUES; PATTERN TRANSFER;

POLYMETHYL METHACRYLATES;

EID: 0032649908     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(99)00028-3     Document Type: Article

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