Diamond nanoimprint lithography

Nanotechnology

Volumn 13, Issue 5, 2002, Pages 592-596

  Taniguchi, Jun ^a   Tokano, Yuji ^a   Miyamoto, Iwao ^a   Komuro, Masanori ^b   Hiroshima, Hiroshi ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DIAMONDS; OXYGEN; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SILICON; SPIN COATING; SUBSTRATES; THERMAL EFFECTS;

NANOIMPRINT LITHOGRAPHY;

ELECTRON BEAM LITHOGRAPHY;

EID: 0036802542     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/5/309     Document Type: Article

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