Embossing of polymers using a thermosetting polymer mold made by soft lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1318-1322

  Xing, Rubo ^a   Wang, Zhe ^a   Han, Yanchun ^a  

^a CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

PLASTICS MOLDING; REACTIVE ION ETCHING; SILICON WAFERS; THERMOSETS;

SOFT LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0141458292     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1585066     Document Type: Conference Paper

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