Iterative roller imprint of multilayered nanostructures

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1543-1545

  Nagato, Keisuke ^a   Sugimoto, Shuntaro ^a   Hamaguchi, Tetsuya ^a   Nakao, Masayuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Imprint; Multilayered nanostructure; Roller

Indexed keywords

LINE-AND-SPACE PATTERNS; MULTILAYERED NANOSTRUCTURES; NANO-STRUCTURED; THERMOPLASTIC POLYMER FILMS;

POLYMER FILMS; ROLLERS (MACHINE COMPONENTS);

NANOSTRUCTURES;

EID: 76949107323     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.029     Document Type: Article

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