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MRS Bulletin

Volumn 30, Issue 12, 2005, Pages 947-951

Imprint materials for nanoscale devices

(2) Stewart, Michael D a Willson, C Grant a

a NONE

Author keywords

Lithography; Nanoscale

Indexed keywords

BIOCOMPATIBILITY; DIELECTRIC MATERIALS; FLUIDICS; INTEGRATED CIRCUITS; NANOTECHNOLOGY; OPTICAL RESOLVING POWER;

NANOIMPRINT LITHOGRAPHY; NANOIMPRINT PROCESSING; NANOSCALE; PHOTOCURABLE PRECURSORS;

LITHOGRAPHY;

EID: 33744821362 PISSN: 08837694 EISSN: None Source Type: Journal
DOI: 10.1557/mrs2005.248 Document Type: Article

Times cited : (59)

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