Suitability of new polymer materials with adjustable glass temperature for nano-imprinting

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 431-434

  Pfeiffer, K ^a   Bleidiessel, G ^a   Gruetzner, G ^a   Schulz, H ^b   Hoffmann, T ^b   Scheer, H C ^b   Sotomayor Torres, C M ^b   Ahopelto, J ^c  

^a MICRO RESIST TECHNOLOGY GMBH   (Germany)

^b UNIVERSITY OF WUPPERTAL   (Germany)

^c VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COPOLYMERIZATION; GLASS; POLYMETHYL METHACRYLATES; THERMODYNAMIC STABILITY;

NANO-IMPRINTING;

NANOTECHNOLOGY;

EID: 0033132695     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00126-4     Document Type: Article

References (12)

1. 1. S.Y. Chou, P.R. Krauss and P.J. Renstrom, Appl. Phys. Lett, 76 (1995) 3114; Science, 272 (1996) 85 and J. Vac. Sci. Technol., B 14 (1996) 4129
2. 1. S.Y. Chou, P.R. Krauss and P.J. Renstrom, Appl. Phys. Lett, 76 (1995) 3114; Science, 272 (1996) 85 and J. Vac. Sci. Technol., B 14 (1996) 4129
3. 1. S.Y. Chou, P.R. Krauss and P.J. Renstrom, Appl. Phys. Lett, 76 (1995) 3114; Science, 272 (1996) 85 and J. Vac. Sci. Technol., B 14 (1996) 4129
4. 2. H.-C. Scheer, U. Kleine, H. Schulz, F. Gottschalch, T. Hoffmann, C.M. Sotomayor Torres, Proc. 5th Zwickauer Automatisierungsforum/Microsystem Technology, (1997) 1446
5. 3. R.W. Jaszewski, H. Schift, J. Gobrecht, P. Smith, Microelectronic Engineering, 41/42 (1998) 575
6. 4. H.-C. Scheer, H. Schulz, T. Hoffmann, C.M. Sotomayor Torres, to appear in J. Vac. Sci. Technol. B
7. 5. S.Y. Chou, P.R. Krauss, W. Zhang, L. Guo, L. Zhuang, J. Vac. Sci. Technol, B15 (1997) 2897
8. 6. S.Y. Chou and P.R. Krauss, Microelectronic Engineering, 35 (1997) 237
9. 7. F. Gottschalch, T. Hoffmann, C.M. Sotomayor Torres, H. Schultz, H.-C. Scheer, to appear in Solid State Electronics
10. 8. M. Fineman, S.D. Ross, J. Polym. Sci., 5 (1950) 259
11. 9. R. Becker, Faserforschung und Textiltechnik, 29 (1978) 301
12. 10. M. Wäsche, R. Kunze, K. Pfeiffer, R. Gnauck, Acta Polymerica, 43 (1992) 34