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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3265-3270

Fabrication of a surface acoustic wave-based correlator using step-and-flash imprint lithography

(11) Cardinale, G F a Skinner, J L a Talin, A A a Brocato, R W b Palmer, D W b Mancini, D P c Dauksher, W J c Gehoski, K c Le, N c Nordquist, K J c Resnick, D J c

a SANDIA NATIONAL LABORATORIES (United States)

b SANDIA NATIONAL LABORATORIES (United States)

c MOTOROLA INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT WRITE E-BEAM (DWEB) LITHOGRAPHY; INTERDIGITATED TRANSDUCERS (IDT); NANOIMPRINT LITHOGRAPHY (NIL); STEP-AND-FLASH IMPRINT LITHOGRAPHY (S-FIL); SURFACE ACOUSTIC WAVE (SAW) CORRELATORS;

ACOUSTIC SURFACE WAVE FILTERS; BIT ERROR RATE; ELECTRON BEAM LITHOGRAPHY; LITHIUM NIOBATE; NANOTECHNOLOGY; PHASE SHIFT KEYING; SCANNING ELECTRON MICROSCOPY; TRANSDUCERS;

CORRELATORS;

EID: 19944431713 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1821508 Document Type: Conference Paper

Times cited : (18)

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