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Volumn 67, Issue 4, 2003, Pages 357-360
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Pattern transfer using step&stamp imprint lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
DRY ETCHING;
GLASS TRANSITION;
PRINTING;
SILICON WAFERS;
THERMOPLASTICS;
WSI CIRCUITS;
PATTERN TRANSFER;
LITHOGRAPHY;
ETCHING;
LITHOGRAPHY;
SILICON;
THERMOPLASTICS;
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EID: 0037397630
PISSN: 00318949
EISSN: None
Source Type: Journal
DOI: 10.1238/Physica.Regular.067a00357 Document Type: Article |
Times cited : (21)
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References (7)
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