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Volumn 67, Issue 4, 2003, Pages 357-360

Pattern transfer using step&stamp imprint lithography

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; GLASS TRANSITION; PRINTING; SILICON WAFERS; THERMOPLASTICS; WSI CIRCUITS;

EID: 0037397630     PISSN: 00318949     EISSN: None     Source Type: Journal    
DOI: 10.1238/Physica.Regular.067a00357     Document Type: Article
Times cited : (21)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.