Nanoimprinted passive optical devices

Nanotechnology

Volumn 13, Issue 5, 2002, Pages 581-586

  Seekamp, J ^a   Zankovych, S ^a   Helfer, A H ^a   Maury, P ^a   Sotomayor Torres, C M ^a   Bottger G ^b   Liguda, C ^b   Eich, M ^b   Heidari, B ^c,e   Montelius, L ^c   Ahopelto, J ^d  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

^c LUND UNIVERSITY   (Sweden)

^d VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^e Box 580   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; LITHOGRAPHY; MORPHOLOGY; OPTICAL WAVEGUIDES; POLYMETHYL METHACRYLATES; POLYSTYRENES; REFRACTIVE INDEX; SILICON COMPOUNDS;

NANOIMPRINT; PASSIVE OPTICAL DEVICES;

NANOTECHNOLOGY;

EID: 18644386140     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/5/307     Document Type: Article

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