SCOPUS 정보 검색 플랫폼

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 400-408

Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applications

(6) Bhusari, Dhananjay b Reed, Hollie A c Wedlake, Michael d Padovani, Agnes M c Allen, Sue Ann Bidstrup c Kohl, Paul A a,c

a IEEE (United States)

b CYPRESS SEMICONDUCTOR (United States)

c Georgia Institute of Technology (United States)

d ADVANCED MICRO DEVICES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CHANNEL STRUCTURES; MICROELECTRONIC APPLICATIONS; MICROFLUIDIC; POLYNORBORNENE;

COPPER; DIELECTRIC MATERIALS; ELECTROPLATING; ENCAPSULATION; ETCHING; HIGH TEMPERATURE OPERATIONS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; ORGANIC POLYMERS; PLASTIC FILMS;

MICROELECTRONIC PROCESSING;

EID: 0035441452 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.946793 Document Type: Article

Times cited : (94)

References (11)

1
- 0027810514
- (1993) J. Micromech. Microeng. , vol.3 , pp. 168
- Gravesen, P.¹ Branebjerg, J.² Jensen, O.S.³

2
- 0032538603
- (1998) Science , vol.282 , pp. 396
- Service, R.F.¹

3
- 0032136372
- (1998) Proc. IEEE , vol.86 , pp. 1769
- Mastrangelo, C.H.¹ Burns, M.A.² Burke, D.T.³

4
- 0002892638
- (1998) Forbes , vol.161 , pp. 76
- Moukheiber, Z.¹

5
- 0012434635
- Proc. Solid State Sensor and Actuator Workshop, 1996 , pp. 15
- Srinivasan, R.¹ Hsing, I.-M.² Ryley, J.³ Harold, M.P.⁴ Jensen, K.F.⁵ Schmidt, M.A.⁶

6
- 0032121792
- (1998) Electrochem. Solid State Lett. , vol.1 , pp. 49
- Kohl, P.A.¹ Zhao, Q.² Patel, K.³ Schmidt, D.⁴ Bidstrup-Allen, S.A.⁵ Shick, R.⁶ Jayaraman, S.⁷

7
- 0001061555
- (1997) Proc. SPIE , vol.3224 , pp. 185
- Raley, N.F.¹ Davidson, J.C.² Balch, J.W.³

8
- 0001103208
- (1998) J. Micromech. Microeng. , vol.8 , pp. 356
- Pethig, P.¹ Burt, J.P.H.² Parton, A.³ Rizvi, N.⁴ Talary, M.S.⁵ Tame, J.A.⁶

9
- 0031364210
- (1997) Proc. Mater. Res. Soc. Symp. , vol.476 , pp. 3
- Grove, N.R.¹ Kohl, P.A.² Bidstrup-Allen, S.A.³ Shick, R.A.⁴ Goodall, B.L.⁵ Jayaraman, S.⁶

10
- 0029733735
- Proc. IEEE Multichip Module Conf., 1996 , pp. 182
- Shick, R.A.¹ Goodall, B.L.² McIntosh, L.H.³ Jayaraman, S.⁴ Kohl, P.A.⁵ Bidstrup-Allen, S.A.⁶ Grove, N.R.⁷

11
- 4243308884
- (2000) Mater. Res. Soc. Symp. Proc. , vol.612
- Bhusari, D.M.¹ Wedlake, M.D.² Kohl, P.A.³ Case, C.⁴ Klemens, F.P.⁵ Miner, J.⁶ Lee, B.C.⁷ Gutmann, R.J.⁸ Lee, J.J.⁹ Shick, R.¹⁰ Rhodes, L.¹¹

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