-
4
-
-
3242676271
-
-
M. D. Austin H. Ge W. Wu M. Li Z. Yu D. Wasserman S. A. Lyon S. Y. Chou Appl. Phys. Lett. 2004 84 5299
-
(2004)
Appl. Phys. Lett.
, vol.84
, pp. 5299
-
-
Austin, M.D.1
Ge, H.2
Wu, W.3
Li, M.4
Yu, Z.5
Wasserman, D.6
Lyon, S.A.7
Chou, S.Y.8
-
6
-
-
24144432962
-
-
M. Stewart S. Johnson S. V. Sreenivasan D. Resnick C. G. Willson J. Microlithogr., Microfabr., Microsyst. 2005 4 1
-
(2005)
J. Microlithogr., Microfabr., Microsyst.
, vol.4
, pp. 1
-
-
Stewart, M.1
Johnson, S.2
Sreenivasan, S.V.3
Resnick, D.4
Willson, C.G.5
-
7
-
-
0032625408
-
-
M. Colburn S. Johnson M. Stewart S. Damle T. Bailey B. Choi M. Wedlake T. Michaelson S. V. Sreenivasan J. Ekerdt C. G. Willson Proc. SPIE-Int. Soc. Opt. Eng. 1999 3676 379
-
(1999)
Proc. SPIE-Int. Soc. Opt. Eng.
, vol.3676
, pp. 379
-
-
Colburn, M.1
Johnson, S.2
Stewart, M.3
Damle, S.4
Bailey, T.5
Choi, B.6
Wedlake, M.7
Michaelson, T.8
Sreenivasan, S.V.9
Ekerdt, J.10
Willson, C.G.11
-
8
-
-
10844291014
-
-
F. Hua Y. Sun A. Gaur M. A. Meiti L. Bilhaunt L. Rotkina J. Wang P. Geil M. Shim J. A. Rogers Nano Lett. 2004 4 2467
-
(2004)
Nano Lett.
, vol.4
, pp. 2467
-
-
Hua, F.1
Sun, Y.2
Gaur, A.3
Meiti, M.A.4
Bilhaunt, L.5
Rotkina, L.6
Wang, J.7
Geil, P.8
Shim, M.9
Rogers, J.A.10
-
9
-
-
34548087916
-
-
See: http://www.itrs.net/Links/2006Update/FinalToPost/ 08_Lithography2006Update.pdf
-
See: http://www.itrs.net/Links/2006Update/FinalToPost/ 08_Lithography2006Update.pdf
-
-
-
-
10
-
-
1642302875
-
-
E. K. Kim N. A. Stacey B. J. Smith M. D. Dickey S. C. Johnson B. C. Trinque C. G. Willson J. Vac. Sci. Technol., B 2004 22 131
-
(2004)
J. Vac. Sci. Technol., B
, vol.22
, pp. 131
-
-
Kim, E.K.1
Stacey, N.A.2
Smith, B.J.3
Dickey, M.D.4
Johnson, S.C.5
Trinque, B.C.6
Willson, C.G.7
-
14
-
-
0003495893
-
-
John Wiley & Sons, Inc., Hoboken, New Jersey, USA, 4th edn, pp. 255-263
-
G. Odian, in Principles of Polymerization, John Wiley & Sons, Inc., Hoboken, New Jersey, USA, 4th edn, 2004, ch. 3, pp. 255-263
-
(2004)
Principles of Polymerization
-
-
Odian In, G.1
-
15
-
-
29044440657
-
-
E. K. Kim M. D. Stewart K. Wu F. L. Palmieri M. D. Dickey J. G. Ekerdt C. G. Willson J. Vac. Sci. Technol., B 2005 23 2967
-
(2005)
J. Vac. Sci. Technol., B
, vol.23
, pp. 2967
-
-
Kim, E.K.1
Stewart, M.D.2
Wu, K.3
Palmieri, F.L.4
Dickey, M.D.5
Ekerdt, J.G.6
Willson, C.G.7
-
18
-
-
33744786540
-
-
G. M. Schmid M. D. Stewart J. Wetzel F. Palmieri J. Hao Y. Nishimura K. Jen E. K. Kim D. J. Resnick J. A. Liddle C. G. Willson J. Vac. Sci. Technol., B 2006 24 1283
-
(2006)
J. Vac. Sci. Technol., B
, vol.24
, pp. 1283
-
-
Schmid, G.M.1
Stewart, M.D.2
Wetzel, J.3
Palmieri, F.4
Hao, J.5
Nishimura, Y.6
Jen, K.7
Kim, E.K.8
Resnick, D.J.9
Liddle, J.A.10
Willson, C.G.11
-
22
-
-
24644465507
-
-
M. D. Stewart J. T. Wetzel G. M. Schmid F. Palmieri E. Thompson E. K. Kim D. Wang K. Sotoodeh K. Jen S. C. Johnson J. Hao M. D. Dickey Y. Nishimura R. M. Laine D. J. Resnick C. G. Willson Proc. SPIE-Int. Soc. Opt. Eng. 2005 5751 210
-
(2005)
Proc. SPIE-Int. Soc. Opt. Eng.
, vol.5751
, pp. 210
-
-
Stewart, M.D.1
Wetzel, J.T.2
Schmid, G.M.3
Palmieri, F.4
Thompson, E.5
Kim, E.K.6
Wang, D.7
Sotoodeh, K.8
Jen, K.9
Johnson, S.C.10
Hao, J.11
Dickey, M.D.12
Nishimura, Y.13
Laine, R.M.14
Resnick, D.J.15
Willson, C.G.16
-
23
-
-
0003495893
-
-
John Wiley & Sons, Inc., Hoboken, New Jersey, USA, 4th Edition, pp. 731-732
-
G. Odian, in Principles of Polymerization, John Wiley & Sons, Inc., Hoboken, New Jersey, USA, 4th Edition, 2004, ch. 9, pp. 731-732
-
(2004)
Principles of Polymerization
-
-
Odian In, G.1
-
25
-
-
34548084371
-
-
W. H. Heath F. Palmieri J. R. Adams B. K. Long J. Chute T. Holcombe S. Zieren M. J. Truitt J. L. White C. G. Willson Macromolecules
-
Macromolecules
-
-
Heath, W.H.1
Palmieri, F.2
Adams, J.R.3
Long, B.K.4
Chute, J.5
Holcombe, T.6
Zieren, S.7
Truitt, M.J.8
White, J.L.9
Willson, C.G.10
-
27
-
-
0036500524
-
-
X. Chen M. A. Dam K. Ono A. Mal H. Shen S. R. Nutt K. Sheran F. Wudl Science 2002 295 1698
-
(2002)
Science
, vol.295
, pp. 1698
-
-
Chen, X.1
Dam, M.A.2
Ono, K.3
Mal, A.4
Shen, H.5
Nutt, S.R.6
Sheran, K.7
Wudl, F.8
-
32
-
-
17444381605
-
-
J. R. McElhanon T. Zifer S. R. Kline D. R. Wheeler D. A. Loy G. M. Jamison T. M. Long K. Rahimian B. A. Simmons Langmuir 2005 21 3259
-
(2005)
Langmuir
, vol.21
, pp. 3259
-
-
McElhanon, J.R.1
Zifer, T.2
Kline, S.R.3
Wheeler, D.R.4
Loy, D.A.5
Jamison, G.M.6
Long, T.M.7
Rahimian, K.8
Simmons, B.A.9
-
41
-
-
35148881158
-
-
K. Jen F. Palmieri B. Chao M. Lin J. Hao J. Owens K. Sotoodeh R. Cheung C. G. Willson Proc. SPIE-Int. Soc. Opt. Eng. 2007 6517 65170K
-
(2007)
Proc. SPIE-Int. Soc. Opt. Eng.
, vol.6517
-
-
Jen, K.1
Palmieri, F.2
Chao, B.3
Lin, M.4
Hao, J.5
Owens, J.6
Sotoodeh, K.7
Cheung, R.8
Willson, C.G.9
|