Nanoimprint lithography on silica sol-gels: A simple route to sequential patterning

Advanced Materials

Volumn 21, Issue 5, 2009, Pages 555-558

  Peroz, Christophe ^a   Chauveau, Vanessa ^a   Barthel, Etienne ^a   Søndergård, Elin ^a  

^a SAINT GOBAIN RECHERCHE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLLOIDS; GELATION; GELS; RHEOLOGY; SILICA; SOL-GELS; SOLS; TUNING;

COMPLEX SHAPES; COMPLEX STRUCTURES; FINE TUNING; LOW PRESSURES; NANO IMPRINTS; NANOIMPRINTING LITHOGRAPHIES; PATTERNING TECHNIQUES; RHEOLOGICAL BEHAVIORS; RHEOLOGICAL PROPERTIES; SECONDARY STRUCTURES; SILICA SOL-GELS; SILICA STRUCTURES; SIMPLE LINES; SIMPLE STRUCTURES;

NANOIMPRINT LITHOGRAPHY;

EID: 60349131290     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200702484     Document Type: Article

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