Mold and metallization: Nanocontact molding for the fabrication of metal structures

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Volumn 3, Issue 10, 2007, Pages 1703-1706

  Hagberg, Erik C ^a   Scott, J Campbell ^a   Shaw, Justine A ^a   Von Werne, Timothy A ^a   Maegerlein, Janet A ^b   Carter, Kenneth R ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b UNIVERSITY OF MASSACHUSETTS   (United States)

Author keywords

Electroless plating; Nanoimprint lithography; Patterning; Surface functionalization

Indexed keywords

ELECTROLESS PLATING; METALLIC FILMS; NANOIMPRINT LITHOGRAPHY;

AQUEOUS PLATING SOLUTION; SURFACE FUNCTIONALIZATION;

MOLDING;

LITHOGRAPHY; MOLDING; PLATING;

COPPER; METAL NANOPARTICLE; POLYMER; UNCLASSIFIED DRUG;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; METHODOLOGY; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY;

COPPER; METAL NANOPARTICLES; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, SCANNING; NANOTECHNOLOGY; POLYMERS;

EID: 35248891086     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.200700343     Document Type: Article

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