Wafer-scale sub-micron lithography

Applied Physics Letters

Volumn 75, Issue 17, 1999, Pages 2599-2601

  Khang, Dahl Young ^a   Lee, Hong H ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000781784     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125090     Document Type: Article

References (10)

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