Polymer to polymer to polymer pattern transfer: Multiple molding for 100 nm scale lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 807-812

  Mele, Elisa ^a   Di Benedetto, Francesca ^a   Persano, Luana ^a   Cingolani, Roberto ^a   Pisignano, Dario ^a  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; LITHOGRAPHY; MICROMACHINING; PLASTICS MOLDING; ULTRAVIOLET RADIATION;

NANOIMPRINTING LITHOGRAPHIES; PATTERN TRANSFER; REPLICA MOLDING;

POLYMERS;

EID: 33645502869     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2184327     Document Type: Article

References (21)

1. Y. Xia, E. Kim, X.-M. Zhao, J. A. Rogers, M. Prentiss, and G. M. Whitesides, Science 273, 347 (1996).
2. Y. Xia and G. M. Whitesides, Angew. Chem., Int. Ed. 37, 550 (1998).
3. H. Schmid and B. Michel, Macromolecules 33, 3042 (2000).
4. T. W. Odom, V. R. Thalladi, J. C. Love, and G. M. Whitesides, J. Am. Chem. Soc. 124, 12112 (2002).
5. F. Hua, Nano Lett. 4, 2467 (2004).
6. Q. Xu, B. Mayers, M. Lahav, D. V. Vezenov, and G. M. Whitesides, J. Am. Chem. Soc. 127, 854 (2005).
7. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
8. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Science 272, 85 (1996).
9. Y. Xia, J. J. McClelland, R. Gupta, D. Qin, X.-M. Zhao, L. L. Sohn, R. J. Celotta, and G. M. Whitesides, Adv. Mater. (Weinheim, Ger.) 9, 147 (1997).
10. Y. Yan, M. B. Chan-Park, J. Gao, and C. Y. Yue, Langmuir 20, 1031 (2004).
11. R. Xing, Z. Wang, and Y. Han, J. Vac. Sci. Technol. B 21, 1318 (2003).
12. G. S. Fiorini, G. D. M. Jeffries, D. S. W. Lim, C. L. Kuyper, and D. T. Chiu, Lab Chip 3, 158 (2003).
13. J. R. Anderson, D. T. Chiu, R. J. Jackman, O. Cherniavskaya, J. C. McDonald, H. Wu, S. H. Whitesides, and G. M. Whitesides, Anal. Chem. 72, 3158 (2000).
14. T. Thorsen, S. J. Maerkl, and S. R. Quake, Science 298, 580 (2002).
15. B. D. Gates, Q. Xu, M. Stewart, D. Ryan, C. Grant Willson, and G. M. Whitesides, Chem. Rev. (Washington, D.C.) 105, 1171 (2005).
16. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, and G. M. Whitesides, Langmuir 18, 5314 (2002).
17. J. M. Shaw, J. D. Gelorme, N. C. LaBianca, W. E. Conley, and S. J. Holmes, IBM J. Res. Dev. 41, 81 (1997).
18. S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).
19. H. Ge, Nano Lett. 5, 179 (2005).
20. G. Strobl, The Physics of Polymers (Springer, Berlin, 1997).
21. O. du Roure, A. Saez, A. Buguin, R. H. Austin, P. Chavrier, P. Silberzan, and B. Ladoux, Proc. Natl. Acad. Sci. U.S.A. 102, 2390 (2005).