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Critical Reviews in Solid State and Materials Sciences

Volumn 28, Issue 4, 2003, Pages

High-κ Dielectric Materials for Microelectronics

(2) Wallace, Robert M a Wilk, Glen D b

a The University of Texas at Dallas (United States)

b ASM AMERICA (United States)

Author keywords

Capacitor; Dielectric; Gate stack; High ; Scaled microelectronics

Indexed keywords

CAPACITORS; ELECTRIC INSULATION; INTERFACES (MATERIALS); MICROELECTRONICS; PERMITTIVITY; RESEARCH AND DEVELOPMENT MANAGEMENT; THERMODYNAMICS;

FILM MORPHOLOGY; GATE DIELECTRICS; INTERFACE STATE DENSITIES; INTERFACIAL BONDING;

DIELECTRIC MATERIALS;

EID: 2342596361 PISSN: 10408436 EISSN: None Source Type: Journal
DOI: 10.1080/714037708 Document Type: Review

Times cited : (108)

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