High temperature stability in lanthanum and zirconia-based gate dielectrics

Journal of Applied Physics

Volumn 90, Issue 7, 2001, Pages 3476-3482

  Maria, J P ^a   Wicaksana, D ^a   Kingon, A I ^a   Busch, B ^b   Schulte, H ^b   Garfunkel, E ^b   Gustafsson, T ^b  

^a North Carolina State University   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035477585     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1391418     Document Type: Article

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