Stress and defects in silicate films and glasses

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 3, 2000, Pages 1749-1751

  Phillips, J C ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT THEORY; CORRELATION METHODS; CRYSTAL DEFECTS; CRYSTALLIZATION; DIELECTRIC FILMS; FUSED SILICA; SILICATES; STRAIN; STRESS ANALYSIS; ULTRATHIN FILMS;

STRAIN ENERGY;

ATOMIC PHYSICS;

EID: 0034187690     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591465     Document Type: Article

References (11)

1. J. C. Phillips, J. Non-Cryst. Solids 34, 153 (1979); 43, 37 (1981); Rigidity Theory and Applications, edited by M. F. Thorpe and P. Duxbury (Kluwer Academic, New York, 1999), p. 155.
2. J. C. Phillips, J. Non-Cryst. Solids 34, 153 (1979); 43, 37 (1981); Rigidity Theory and Applications, edited by M. F. Thorpe and P. Duxbury (Kluwer Academic, New York, 1999), p. 155.
3. J. C. Phillips, J. Non-Cryst. Solids 34, 153 (1979); 43, 37 (1981); Rigidity Theory and Applications, edited by M. F. Thorpe and P. Duxbury (Kluwer Academic, New York, 1999), p. 155.
4. H. He and M. F. Thorpe, Phys. Rev. Lett. 54, 2107 (1985); M. F. Thorpe, D. J. Jacobs, N. V. Chubinsky, and A. J. Rader, Ref. 1, p. 239.
5. H. He and M. F. Thorpe, Phys. Rev. Lett. 54, 2107 (1985); M. F. Thorpe, D. J. Jacobs, N. V. Chubinsky, and A. J. Rader, Ref. 1, p. 239.
6. R. Kemer and J. C. Phillips (unpublished).
7. D. G. Bumett and R. W. Douglas, Phys. Chem. Glasses 11, 125 (1970).
8. G. Lucovsky, Y. Wu, H. Niimi, V. Misra, and J. C. Phillips, J. Vac. Sci. Technol. B 17, 1806 (1999).
9. R. F. Geller and S. M. Lang, NBS Report, 1959.
10. E. M. Levin, C. R. Robbins, and H. F. McMurdie, Phase Diagrams for Ceramists (American Ceramic Society, Columbus, OH, 1964).
11. G. D. Wilk and F.-M. Wallace, Appl. Phys. Lett. 76, 112 (2000).