Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics

Applied Physics Letters

Volumn 77, Issue 15, 2000, Pages 2385-2387

  Chambers, J J ^a   Parsons, G N ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000019304     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1316073     Document Type: Article

References (14)

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