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Applied Physics Letters

Volumn 79, Issue 13, 2001, Pages 1998-2000

Composition, atomic transport, and chemical stability of ZrAlxOy ultrathin films deposited on Si(001)

(5) Morais, J a Da Rosa, E B O a Pezzi, R P a Miotti, L a Baumvol, I J R a

a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035943816 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1405808 Document Type: Article

Times cited : (11)

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