SCOPUS 정보 검색 플랫폼

Surface Science Reports

Volumn 36, Issue 1, 1999, Pages 1-166

Atomic transport during growth of ultrathin dielectrics on silicon

(1) Baumvol, I J R a

a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; DIFFUSION IN SOLIDS; DISSOCIATION; DYNAMIC RANDOM ACCESS STORAGE; FILM GROWTH; HYDROGEN; MOSFET DEVICES; OXYGEN; SEMICONDUCTING FILMS; SILICA; SILICON NITRIDE; ULTRATHIN FILMS;

OXYNITRIDE FILMS;

SILICON;

EID: 0033343648 PISSN: 01675729 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-5729(99)00006-0 Document Type: Review

Times cited : (135)

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