Electrical properties of ZrO2 gate dielectric on SiGe

Applied Physics Letters

Volumn 76, Issue 4, 2000, Pages 502-504

  Ngai, T ^a   Qi, W J ^a   Sharma, R ^a   Fretwell, J ^a   Chen, X ^a   Lee, J C ^a   Banerjee, S ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001494942     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125801     Document Type: Article

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