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Volumn 27, Issue 3, 2002, Pages 198-204

A thermodynamic approach to selecting alternative gate dielectrics

(2) Schlom, Darrell G a Haeni, Jeffrey H a

a NONE

Author keywords

Bandgap; High dielectric constant materials; High dielectrics; Thermal stability; Thermodynamics

Indexed keywords

ENERGY GAP; GATES (TRANSISTOR); MOSFET DEVICES; NITRIDES; OXIDES; PERMITTIVITY; SILICON; TEMPERATURE; THERMODYNAMIC STABILITY; THERMODYNAMICS;

ALTERNATIVE GATE DIELECTRICS; BANDGAP; BINARY OXIDES; HIGH DIELECTRIC CONSTANT MATERIALS;

DIELECTRIC MATERIALS;

EID: 0036502104 PISSN: 08837694 EISSN: None Source Type: Journal
DOI: 10.1557/mrs2002.71 Document Type: Article

Times cited : (310)

References (62)

1
- 0004245602
- (Semiconductor Industry Association, San Jose, CA)
- (1999) International Technology Roadmap for Semiconductors: 1999 , pp. 105

2
- 0003552056
- (Semiconductor Industry Association, San Jose, CA)
- (1997) National Technology Roadmap for Semiconductors , pp. 72

3
- 0034739021
- (2000) Nature , vol.406 , pp. 1032
- Kingon, A.I.¹ Maria, J.-P.² Streiffer, S.K.³

4
- 0035872897
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

5
- 0003477976
- (VCH, Weinheim)
- (1995) Thermochemical Data of Pure Substances, 3rd Ed. , vol.1-2
- Barin, I.¹

6
- 0342830116
- High-κ candidates for use as the gate dielectric in silicon MOSFETs
- in press
- Appl. Phys. A
- Schlom, D.G.¹ Billman, C.A.² Haeni, J.H.³ Lettieri, J.⁴ Tan, P.H.⁵ Held, R.R.M.⁶ Völk, S.⁷ Hubbard, K.J.⁸

7
- 0025418031
- (1990) J. Electrochem. Soc. , vol.137 , pp. 1297
- Zaima, S.¹ Furuta, T.² Yasuda, Y.³ Iida, M.⁴

8
- 0032516989
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1517
- Alers, G.B.¹ Werder, D.J.² Chabal, Y.³ Lu, H.C.⁴ Gusev, E.P.⁵ Garfunkel, E.⁶ Gustafsson, T.⁷ Urdahl, R.S.⁸

9
- 0000485283
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 954
- Mao, A.Y.¹ Son, K.A.² White, J.M.³ Kwong, D.L.⁴ Roberts, D.A.⁵ Vrtis, R.N.⁶

10
- 0031699079
- (1998) Chem. Vap. Dep. , vol.4 , pp. 9
- Gilmer, D.C.¹ Colombo, D.G.² Taylor, C.J.³ Roberts, J.⁴ Haugstad, G.⁵ Campbell, S.A.⁶ Kim, H.-S.⁷ Wilk, G.D.⁸ Gribelyuk, M.A.⁹ Gladfelter, W.L.¹⁰

11
- 0001089954
- (1969) IBM J. Res. Dev. , vol.13 , Issue.2 , pp. 686
- Pennebaker, W.B.¹

12
- 0018444433
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 315
- Panitz, J.K.G.¹ Hu, C.C.²

13
- 0020114040
- (1983) J. Vac. Sci. Technol., A , vol.1 , pp. 483
- Dharmadhikari, V.S.¹ Grannemann, W.W.²

14
- 0000670674
- Ferroelectric thin films
- edited by E.R. Myers and A.I. Kingon
- (1990) Mater. Res. Soc. Symp. Proc. 200, Pittsburgh , pp. 243
- Matsubara, S.¹ Sakuma, T.² Yamamichi, S.³ Yamguchi, H.⁴ Miyasaka, Y.⁵

15
- 0001410026
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2431
- Sakuma, T.¹ Yamamichi, S.² Matsubara, S.³ Yamaguchi, H.⁴ Miyasaka, Y.⁵

16
- 0026224033
- (1991) Jpn. J. Appl. Phys., Part 1 , vol.30 , pp. 2197
- Yamaguchi, H.¹ Matsubara, S.² Miyasaka, Y.³

17
- 0026172330
- (1991) Jpn. J. Appl. Phys., Part 2: Lett. , vol.30
- Nagata, H.¹ Tsukahara, T.² Gonda, S.³ Yoshimoto, M.⁴ Koinuma, H.⁵

18
- 0035309756
- (2001) J. Appl. Phys. , vol.89 , pp. 3920
- Kwo, J.¹ Hong, M.² Kortan, A.R.³ Queeney, K.L.⁴ Chabal, Y.J.⁵ Opila R.L., Jr.⁶ Muller, D.A.⁷ Chu, S.N.G.⁸ Sapjeta, B.J.⁹ Lay, T.S.¹⁰ Mannaerts, J.P.¹¹ Boone, T.¹² Krautter, H.W.¹³ Krajewski, J.J.¹⁴ Sergent, A.M.¹⁵ Rosamilia, J.M.¹⁶

19
- 85037014019
- (private communication); note
- Werder, D.J.¹ Alers, G.B.² Chabal, Y.³ Lu, H.C.⁴ Gusev, E.P.⁵ Garfunkel, E.⁶ Gustafsson, T.⁷ Urdahl, R.S.⁸

20
- 84954162075
- 2 films on Si
- submitted for publication
- (2001) Appl. Phys. Lett.
- Maria, J.-P.¹ Schulte, W.H.² Wicaksana, D.³ Busch, B.⁴ Kingon, A.I.⁵ Garfunkel, E.⁶

21
- 0001459359
- (2001) Appl. Phys. Lett. , vol.78 , pp. 368
- Jeon, T.S.¹ White, J.M.² Kwong, D.L.³

22
- 0021466317
- (1984) J. Appl. Phys. , vol.56 , pp. 147
- Beyers, R.¹

23
- 2242483418
- (1984) J. Vac. Sci. Technol., B , vol.2 , pp. 781
- Beyers, R.¹ Sinclair, R.² Thomas, M.E.³

24
- 36549095057
- (1987) J. Appl. Phys. , vol.61 , pp. 2195
- Beyers, R.¹ Kim, K.B.² Sinclair, R.³

25
- 4244203604
- Formation and transformation of titanium disilicide thin films on silicon substrates
- PhD dissertation, Stanford University
- (1989) , pp. 38
- Beyers, R.¹

26
- 0030291621
- (1996) J. Mater. Res. , vol.11 , pp. 2757
- Hubbard, K.J.¹ Schlom, D.G.²

27
- 85037009973
- Thermodynamic stability of binary nitrides in contact with silicon
- submitted for publication
- (2002) J. Mater. Res.
- Tan, P.H.¹ Schlom, D.G.²

28
- 0035737920
- (2001) J. Electron. Mater. , vol.30 , pp. 1493
- Zhong, H.¹ Heuss, G.² Suh, Y.-S.³ Misra, V.⁴ Hang, S.-N.⁵

29
- 0040622140
- (2001) Appl. Phys. Lett. , vol.79 , pp. 671
- Liu, J.P.¹ Zaumseil, P.² Bugiel, E.³ Osten, H.J.⁴

30
- 84973339075
- (CRC Press, Boca Raton, FL)
- (1996) CRC Handbook of Chemistry and Physics: A Ready-Reference Book of Chemical and Physical Data, 77th Ed.

31
- 0026925927
- (1992) Surf. Interface Anal. , vol.18 , pp. 685
- Behner, H.¹ Wecker, J.² Matthée, Th.³ Samwer, K.⁴

32
- 29144508339
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1240
- Matthée, Th.¹ Wecker, J.² Behner, H.³ Friedl, G.⁴ Eibl, O.⁵ Samwer, K.⁶

33
- 0000531593
- (1991) J. Appl. Phys. , vol.69 , pp. 2176
- Fenner, D.B.¹ Viano, A.M.² Fork, D.K.³ Connell, G.A.N.⁴ Boyce, J.B.⁵ Ponce, F.A.⁶ Tramontana, J.C.⁷

34
- 0010678638
- Ferroelectric thin films II
- edited by A.I. Kingon, E.R. Myers, and B. Tuttle
- (1992) Mater. Res. Soc. Symp. Proc. 243, Pittsburgh , pp. 81
- Rou, S.H.¹ Graettinger, T.M.² Chow, A.F.³ Soble C.N. II⁴ Lichtenwalner, D.J.⁵ Auciello, O.⁶ Kingon, A.I.⁷

35
- 36449003275
- (1993) J. Appl. Phys. , vol.73 , pp. 348
- Shannon, R.D.¹

36
- 4244101024
- (1998) Phys. Rev. Lett. , vol.81 , pp. 3014
- McKee, R.A.¹ Walker, F.J.² Chisholm, M.F.³

37
- 0001433305
- [Russ. Microelectron. 27 (1998) p. 291]
- (1998) Mikroelektron , vol.27 , pp. 340
- Il'chenko, V.V.¹ Kuznetsov, G.V.² Strikha, V.I.³ Tsyganova, A.I.⁴

38
- 0002021066
- [Sov. Tech. Phys. Lett. 27 (2001) p. 333]
- (2001) Pis'ma Zh. Tekh. Fiz. , vol.27 , pp. 58
- Il'chenko, V.V.¹ Kuznetsov, G.V.²

39
- 0003781076
- (Oxford University Press, Oxford)
- (1957) Physical Properties of Crystals: Their Representation by Tensors and Matrices
- Nye, J.F.¹

40
- 0008775640
- CD-ROM database (International Center for Diffraction Data, Newton Square, PA)
- (1997) NIST Crystal Data 1997

41
- 0008781534
- in press
- (2002) J. Appl. Phys.
- Lim, S.-G.¹ Kriventsov, S.² Jackson, T.N.³ Haeni, J.H.⁴ Schlom, D.G.⁵ Balbashov, A.M.⁶ Uecker, R.⁷ Reich, P.⁸ Freeouf, J.L.⁹ Lucovsky, G.¹⁰

42
- 85037010681
- 3
- submitted for publication
- (2002) J. Appl. Phys.
- Haeni, J.H.¹ Trolier-McKinstry, S.² Lim, S.-G.³ Jackson, T.N.⁴ Rosario, M.M.⁵ Freeouf, J.L.⁶ Uecker, R.⁷ Reiche, P.⁸ Schlom, D.G.⁹

43
- 85037024399
- (private communication)
- Gilmer, D.C.¹

44
- 0000450066
- (1971) Solid State Commun. , vol.9 , pp. 2259
- DiStefano, T.H.¹ Eastman, D.E.²

45
- 0008743715
- (1968) J. Electrochem. Soc. , vol.115 , pp. 948
- Brown, G.A.¹ Robinette W.C., Jr.² Carlson, H.G.³

46
- 0001580170
- (1968) Appl. Phys. Lett. , vol.13 , pp. 275
- Goodman, A.M.¹

47
- 0025400035
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 477
- French, R.H.¹

48
- 36049060214
- (1967) Phys. Rev. , vol.159 , pp. 733
- Roessler, D.M.¹ Walker, W.C.²

49
- 84956276027
- (1990) Phys. Scr. , vol.41 , pp. 537
- Bortz, M.L.¹ French, R.H.² Jones, D.J.³ Kasowski, R.V.⁴ Ohuchi, F.S.⁵

50
- 0642372605
- [Sov. Phys. Solid State 20 (1978) p. 399]
- (1978) Fiz. Tverd. Tela (Leningrad) , vol.20 , pp. 689
- Abramov, V.N.¹ Kuznetsov, A.I.²

51
- 0003395029
- O. Madelung, M. Schulz, and H. Weiss, eds.; (Springer, Berlin)
- (1982) Landolt-Börnstein: Numerical Data and Functional Relationships in Science and Technology , vol.17 B

52
- 85037025814
- (private communication)
- Zollner, S.¹

53
- 0008795781
- (1966) J. Phys. Chem. Solids , vol.27 , pp. 1069
- Tippins, H.H.¹

54
- 0000370524
- [Sov. Chem. Dokl. 175 (1967) p. 710]
- (1967) Dokl. Chem. Akad. Nauk SSSR , vol.175 , pp. 1062
- Derbeneva, S.S.¹ Batsanov, S.S.²

55
- 0001347482
- [J. Appl. Spectrosc. (USSR) 28 (1978) p. 610]
- (1978) Zh. Prikl. Spektrosk. , vol.28 , pp. 895
- Andreeva, A.F.¹ Gil'man, I.Y.²

56
- 21944444563
- G.V., Samsonov, ed.; (IFI/Plenum Publishers, New York)
- (1982) The Oxide Handbook, 2nd Ed. , pp. 213

57
- 0001307437
- (1994) Phys. Rev. B , vol.49 , pp. 5133
- French, R.H.¹ Glass, S.J.² Ohuchi, F.S.³ Xu, Y.-N.⁴ Ching, W.Y.⁵

58
- 0001205831
- (1990) J. Appl. Phys. , vol.68 , pp. 4214
- Samara, G.A.¹

59
- 0032165432
- (1998) Opt. Mater. , vol.10 , pp. 291
- Ovanesyan, K.L.¹ Petrosyan, A.G.² Shirinyan, G.O.³ Pedrini, C.⁴ Zhang, L.⁵

60
- 0030182997
- (1996) Solid State Ionics , vol.86-88 , pp. 629
- Sata, N.¹ Ishigame, M.² Shin, S.³

61
- 0008780045
- edited by G.L. Trigg (VCH Publishers, New York)
- (1995) Encyclopedia of Applied Physics , vol.12 , pp. 285
- Collins, R.W.¹ Vedam, K.²

62
- 0030182997
- (1996) Solid State Ionics , vol.86-88 , pp. 629
- Sata, N.¹ Ishigame, M.² Shin, S.³

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