Boron penetration in p+ polycrystalline-Si/Al2O3/Si metal-oxide-semiconductor system

Applied Physics Letters

Volumn 77, Issue 14, 2000, Pages 2207-2209

  Park, Dae Gyu ^a   Cho, Heung Jae ^a   Yeo, In Seok ^a   Roh, Jae Sung ^a   Hwang, Jeong Mo ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000326893     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1315346     Document Type: Article

References (18)

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