Structure and stability of ultrathin zirconium oxide layers on Si(001)

Applied Physics Letters

Volumn 76, Issue 4, 2000, Pages 436-438

  Copel, M ^a   Gribelyuk, M ^b   Gusev, E ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000020022     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125779     Document Type: Article

References (13)

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