Quantum effect in oxide thickness determination from capacitance measurement

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1999, Pages 77-78

  Yang, Kevin ^a   King, Ya Chin ^a   Hu, Chenming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; ELLIPSOMETRY; QUANTUM THEORY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MODELS;

CAPACITANCE VOLTAGE CHARACTERISTICS; GATE OXIDE; MOSFET DRAIN CURRENT MODELING;

GATES (TRANSISTOR);

EID: 0033281224     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)