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Physical Review B - Condensed Matter and Materials Physics

Volumn 62, Issue 20, 2000, Pages

Oxygen exchange and transport in thin zirconia films on Si(100)

(7) Busch, B W a Schulte, W H a Garfunkel, E a Gustafsson, T a Qi, W b Nieh, R b Lee, J b

a RUTGERS UNIVERSITY (United States)

b The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ISOTOPE; OXYGEN; SILICON; ZIRCONIUM OXIDE;

ARTICLE; CRYSTAL STRUCTURE; CRYSTALLIZATION; DIFFUSION; FILM; OXIDATION; OXYGEN TRANSPORT; PRESSURE; TEMPERATURE;

EID: 0034668553 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevB.62.R13290 Document Type: Article

Times cited : (142)

References (18)

1
- 0004245602
- (1999) International Technology Roadmap for Semiconductors: 1999 Edition

2
- 0026711315
- (1992) Thin Solid Films , vol.207 , pp. 193
- Kalkur, T.S.¹ Lu, Y.C.²

3
- 0346534582
- (2000) J. Appl. Phys. , vol.87 , pp. 484
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

4
- 0000020022
- (2000) Appl. Phys. Lett. , vol.76 , pp. 436
- Copel, M.¹ Gribelyuk, M.² Gusev, E.³

5
- 0033312228
- IEEE
- (1999) Technical Digest International Electron Device Meeting , pp. 145
- Qi, W.J.¹ Nieh, R.² Lee, B.H.³ Kang, L.⁴ Jeon, Y.⁵ Onishi, K.⁶ Ngai, T.⁷ Banerjee, S.⁸ Lee, J.C.⁹

6
- 0033315071
- see Ref. 5
- Ma, Y.¹ Ono, Y.² Stecker, L.³ Evans, D.R.⁴ Hsu, S.T.⁵

7
- 33744626747
- unpublished
- Kawamoto, A.¹ Jameson, J.² Griffin, P.³ Cho, K.⁴ Dutton, R.⁵

8
- 0034227861
- (2000) Appl. Surf. Sci. , vol.161 , pp. 115
- Sun, Y.-M.¹ Lozano, J.² Ho, H.³ Park, H.J.⁴ Veldman, S.⁵ White, J.M.⁶

9
- 1842313954
- (1985) Surf. Sci. Rep. , vol.5 , pp. 199
- Van der Veen, J.F.¹

10
- 36449000015
- (1991) Rev. Sci. Instrum. , vol.62 , pp. 2679
- Tromp, R.M.¹ Copel, M.² Reuter, M.C.³ Von Hoegen, M.H.⁴ Speidell, J.⁵ Koudijs, R.⁶

11
- 0003412161
- IBM
- (1998) SRIM-The Stopping and Range of Ions in Matter Ver. 9
- Ziegler, J.F.¹ Biersack, J.P.²

12
- 0000620725
- (1995) Phys. Rev. B , vol.52 , pp. 1759
- Gusev, E.P.¹ Lu, H.C.² Gustafsson, T.³ Garfunkel, E.⁴

13
- 0026868692
- (1992) Solid State Ionics , vol.52 , pp. 23
- Badwal, S.P.S.¹

14
- 0000969098
- (1999) J. Appl. Phys. , vol.85 , pp. 7646
- Brossmann, U.¹ Wrschum, R.² Sdervall, U.³ Schaefer, H.E.⁴

15
- 0032482909
- (1998) Thin Solid Films , vol.326 , pp. 106
- Schofield, M.A.¹ Aita, C.R.² Rice, P.M.³ Gajdardziska-Josifovska, M.⁴

16
- 0003093015
- (1999) Thin Solid Films , vol.352 , pp. 73
- Gulino, A.¹ Compagnini, G.² Egdell, R.G.³ Fragala, I.⁴

17
- 21544454515
- (1977) J. Phys. Chem. , vol.82 , pp. 218
- Garvie, R.C.¹

18
- 0030190352
- (1996) Nanostruct. Mater. , vol.7 , pp. 535
- Nitsche, R.¹ Rodewald, M.² Skandan, G.³ Fuess, H.⁴ Hahn, H.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.