Study of ultrathin Al2O3/Si(001) interfaces by using scanning reflection electron microscopy and x-ray photoelectron spectroscopy

Applied Physics Letters

Volumn 78, Issue 11, 2001, Pages 1517-1519

  Kundu, Manisha ^a   Miyata, Noriyuki ^a   Ichikawa, Masakazu ^a  

^a NATL INST FOR ADV INTERDISC RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035848173     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1355294     Document Type: Article

References (18)

1. D. Buchanan, IBM J. Res. Dev. 43, 245 (1999).
2. E. P. Gusev, M. Copel, E. Cartier, I. J. R. Baumvol, C. Krug, and M. A. Gribelyuk, Appl. Phys. Lett. 76, 176 (2000).
3. R. Ludeke, M. T. Cuberes, and E. Cartier, J. Vac. Sci. Technol. B 18, 2153 (2000).
4. T. M. Klein, D. Niu, W. S. Epling, W. Li, D. M. Maher, C. C. Hobbs, R. I. Hegde, I. J. R. Baumvol, and G. N. Parsons, Appl. Phys. Lett. 75, 4001 (1999).
5. R. Ludeke, M. T. Cuberes, and E. Cartier, Appl. Phys. Lett. 76, 2886 (2000).
6. H. Watanabe and M. Ichikawa, Rev. Sci. Instrum. 67, 4185 (1996).
7. H. Watanabe, K. Kato, T. Uda, K. Fujita, M. Ichikawa, T. Kawamura, and K. Terakura, Phys. Rev. Lett. 80, 345 (1998).
8. C. Klauber and R. St. C. Smart, in Surface Analysis Methods in Materials Science, edited by D. J. O'Conner, B. A. Sexton, and R. St. C. Smart (Springer, New York, 1991), p. 3.
9. 3 layers.
10. J. Nogami, A. A. Baski, and C. F. Quale, Phys. Rev. B 44, 1415 (1991).
11. M. Ichikawa, J. Phys.: Condens. Matter 11, 9861 (1999).
12. M. A. Hasan, G. Radnoczi, J. E. Sundgren, and G. V. Hansson, Surf. Sci. 236, 53 (1990).
13. S. Fujita, H. Watanabe, S. Maruno, M. Ichikawa, and T. Kawamura, Appl. Phys. Lett. 71, 885 (1997).
14. S. Fujita, S. Maruno, H. Watanabe, and M. Ichikawa, Appl. Phys. Lett. 69, 638 (1996).
15. P. M. A. Sherwood, J. Vac. Sci. Technol. A 14, 1424 (1996).
16. I. Olefjord, H. J. Mathieu, and P. Marcus, Surf. Interface Anal. 15, 681 (1990).
17. T. L. Barr, in Modern ESCA: The Principles and Practice of X-Ray Photoelectron Spectroscopy (CRC Press, Boca Raton, 1994).
18. N. Miyata, M. Shigeno, Y. Arimoto, and T. Ito, J. Appl. Phys. 74, 5275 (1993).