Band diagram and carrier conduction mechanism in ZrO2/Zr-silicate/Si MIS structure fabricated by pulsed-laser-ablation deposition

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 19-22

  Yamaguchi, T ^a   Satake, H ^a   Fukushima, N ^a   Toriumi, A ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CHARGE CARRIERS; DIELECTRIC MATERIALS; ELECTRODEPOSITION; ELECTRON TRANSPORT PROPERTIES; HOLE MOBILITY; LASER ABLATION; PULSED LASER APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

BAND DIAGRAMS;

ZIRCONIUM COMPOUNDS;

EID: 0034452583     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)