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Volumn 80, Issue 12, 2002, Pages 2135-2137
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Soft x-ray photoemission studies of the HfO2/SiO2/Si system
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Author keywords
[No Author keywords available]
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Indexed keywords
SOFT X-RAY PHOTOELECTRON SPECTROSCOPY;
SOFT X-RAY PHOTOEMISSION;
VALENCE-BAND MAXIMUMS;
VALENCE-BAND OFFSET;
HAFNIUM OXIDES;
SILICON;
VALENCE BANDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
SILICON COMPOUNDS;
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EID: 79956054375
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1450049 Document Type: Article |
Times cited : (161)
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References (14)
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