Review: Developments in micro/nanoscale fabrication by focused ion beams

Vacuum

Volumn 86, Issue 8, 2012, Pages 1014-1035

  Kim, Chung Soo ^a   Ahn, Sung Hoon ^a,b   Jang, Dong Young ^c  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

^c Seoul National University of Science and Technology   (South Korea)

Author keywords

Deposition; Focused ion beam; Implantation; Micro nanoscale structure fabrication; Milling

Indexed keywords

COMPLEX STRUCTURE; CONSTRUCTIVE PROCESS; FABRICATION PROCESS; FOCUSED ION BEAM TECHNOLOGY; MATERIAL PROCESSING; MICRO/NANOSCALE STRUCTURE FABRICATION; MICRO/NANOSTRUCTURES; NANOSCALE EFFECTS; PRECISION FABRICATION; STRUCTURAL STABILITIES;

DEPOSITION; FABRICATION; ION IMPLANTATION; MILLING (MACHINING); STABILITY;

FOCUSED ION BEAMS;

EID: 84858158602     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.11.004     Document Type: Review

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