Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1221-1224

  Igaki, Jun ya ^a,b   Kometani, Reo ^a,b   Nakamatsu, Ken ichiro ^a,b   Kanda, Kazuhiro ^a,b   Haruyama, Yuichi ^a,b   Ochiai, Yukinori ^b,c   Fujita, Jun ichi ^b,d   Kaito, Takashi ^e   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c NEC CORPORATION   (Japan)

^d UNIVERSITY OF TSUKUBA   (Japan)

^e SII NANOTECHNOLOGY INC   (Japan)

Author keywords

Focused ion beam chemical vapor deposition; Nano rotor; Nano sheet; Three dimensional

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROSTATICS; ION BEAM ASSISTED DEPOSITION; NANOSTRUCTURED MATERIALS; ROTORS;

ELECTROSTATIC ATTRACTIVE FORCE; FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION (FIB-CVD); NANO ROTORS; NANO SHEETS;

NANOTECHNOLOGY;

EID: 33748259479     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.12.022     Document Type: Article

References (4)

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4. Kometani R., Morita R., Watanabe K., Hoshino T., Kondo K., Kanda K., Haruyama Y., Kaito T., Fujita J., Ishida M., Ochiai Y., and Matsui S. J. Vac. Sci. Technol. B 22 (2004) 257