Modification of field emitter array tip shape by focused ion-beam irradiation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 1973-1976

  Takai, M ^a   Kishimoto, T ^a   Yamashita, M ^a   Morimoto, H ^a   Yura, S ^b   Hosono, A ^b   Okuda, S ^b   Lipp, S ^c   Frey, L ^c   Ryssel, H ^c  

^a OSAKA UNIVERSITY   (Japan)

^b MITSUBISHI ELECTRIC CORPORATION   (Japan)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001456772     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588967     Document Type: Article

References (9)

1. T. Asano and T. Tamon, in Technical Digest of IVMC91, Nagahama, 1991, edited by S. Namba, Y. Nannichi, and T. Utsumi, p. 88.
2. M. Komuro and H. Hiroshima, J. Vac. Sci. Technol. B 9, 2656 (1991).
3. P. R. Schwoebel and C. A. Spindt, Appl. Phys. Lett. 63, 33 (1993).
4. P. R. Wilshaw and E. C. Boswell, J. Vac. Sci. Technol. B 12, 662 (1994).
5. M. Takai, M. Yamashita, H. Wille, S. Yura, S. Horibata, and M. Ototake, Appl. Phys. Lett. 66, 422 (1995).
6. M. Takai, M. Yamashita, H. Wille, S. Yura, S. Horibata, and M. Ototake, J. Vac. Sci. Technol. B 13, 441 (1995).
7. J. Ishikawa, T. Ohtake, Y. Gotoh, H. Tsuji, N. Fukayama, K. Inoue, S. Nagamachi, Y. Yamakage, M. Ueda, H. Maruno, and M. Asari, J. Vac. Sci. Technol. B 13, 452 (1995).
8. M. Takai, Scanning Microsc. 7, 815 (1993).
9. A. Wagner, J. P. Levin, J. L. Mauer, P. G. Blauner, S. J. Kirch, and P. Longo, J. Vac. Sci. Technol. B 8, 1557 (1990).