Fabrication of nanoscale heterostructure devices with a focused ion beam microscope

Nanotechnology

Volumn 14, Issue 6, 2003, Pages 630-632

  Bell, C ^a   Burnell, G ^a   Kang, D J ^a   Hadfield, R H ^a   Kappers, M J ^a   Blamire, M G ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GALLIUM NITRIDE; ION BEAMS; ION MICROSCOPES; LIGHT EMITTING DIODES; MAGNETORESISTANCE; MOLYBDENUM ALLOYS; SEMICONDUCTOR DEVICE MANUFACTURE;

FOCUS ION BEAM MICROSCOPE; MAGNETORESISTIVE MULTILAYER DEVICES; NANOSCALE HETEROSTRUCTURE DEVICES;

JOSEPHSON JUNCTION DEVICES;

EID: 0037866932     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/14/6/312     Document Type: Article

References (14)

1. Moseley R W, Booij W E, Tarte E J and Blamire M G 1999 Appl. Phys. Lett. 75 262
2. Kim S-J. Latyshev Yu I and Yamashita T 1999 Appl. Phys. Lett. 74 1156
3. Pratt W P Jr., Lee S-F, Slaughter J M, Loloee R, Schroeder P A and Bass J 1991 Phys. Rev. Lett. 66 3060
4. Kaminsky W M, Jones G A C, Patel N K, Booij W E, Blamire M G, Gardiner S M, Xu Y B and Bland J A C 2001 Appl. Phys. Lett. 78 1589
5. Ryazanov V V, Oboznov V A, Rusanov A Yu, Veretennikov A V, Golubov A A and Aarts J 2001 Phys. Rev. Lett. 86 2427
6. Kontos T, Aprili M, Lesueur J, Genêt F, Stephanidis B and Boursier R Phys. Rev. Lett. 2002 89 137007
7. Bergeret F S, Volkov A F and Efetov K B 2001 Phys. Rev. B 64 134506
8. Warburton P A, Kuzhakhmetov A R, Bell C, Burnell G, Blamire M G, Wu H, Grovenor C R M and Schneidewind H 2003 IEEE Trans. Appl. Supercond. at press
9. Chyr I, Lee B, Chao L C and Steckl A J 1999 J. Vac. Sci. Technol. B 17 3063
10. Kuball M, Benyoucef M, Morrissey F H and Foxon C T 2000 MRS Internet J. Nitride Semicond. Res. 5S1 W12.3
11. Hu J, Li L-S, Lang W, Manna L, Wang L-W and Alivisatos A P 2001 Science 292 2060
12. Smit G D J, Flokstra M G, Rogge S and Klapwijk T M 2002 Microelectron. Eng. 64 429
13. Ho J-K, Jong C-S, Chiu C C, Huang C-N, Chen C-Y and Shih K-K 1999 Appl. Phys. Lett. 74 1275 and references therein
14. Latif A, Booij W E, Durrell J H and Blamire M G 2000 J. Vac. Sci. Technol. B 18 761