Patterning of amorphous and polycrystalline Ni 78 B 14 Si 8 with a focused-ion-beam

Applied Surface Science

Volumn 253, Issue 12, 2007, Pages 5404-5410

  Li, Wuxia ^a,b   Minev, Roussi ^a   Dimov, Stefan ^a   Lalev, Georgi ^a  

^a CARDIFF UNIVERSITY   (United Kingdom)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

Focused ion beam; Micro nano tooling; Ni 78 B 14 Si 8 alloys; Patterning

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; INJECTION MOLDING; ION BEAMS; SPUTTERING;

FOCUSED-ION-BEAM; MICRO/NANO-TOOLING; NI78B14SI8 ALLOYS;

NICKEL ALLOYS;

EID: 33847627461     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.12.018     Document Type: Article

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