Patterning and characterization of 2D photonic crystals fabricated by focused ion beam etching of multilayer membranes

Nanotechnology

Volumn 15, Issue 3, 2004, Pages 341-346

  Paraire, N A ^a   Filloux, P G ^a   Wang, K ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM ETCHING; MULTILAYER MEMBRANES; PHOTONIC CRYSTALS;

ANISOTROPY; BIREFRINGENCE; CHEMICAL VAPOR DEPOSITION; ETCHING; ION BEAMS; LIGHT POLARIZATION; LITHOGRAPHY; OPTICAL BEAM SPLITTERS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY;

PHOTONS;

EID: 1642634576     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/3/019     Document Type: Article

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